基于快速终端滑模扩张状态观测器的电磁式MEMS微镜改进抗扰算法

doi:10.12305/j.issn.1001-506X.2026.07.24

摘要/Abstract

摘要：

为提高电磁式微机电系统微镜在激光扫描和指向任务中抗扰性能，提出一种基于快速终端滑模扩张状态观测器（fast terminal sliding mode extended state observer，FTSMESO）的积分终端滑模控制算法。首先，构造一种FTSMESO用来估计补偿外部扰动与不确定性，并将其与积分终端滑模控制结合，实现对控制指令的快速稳定跟踪。随后，通过Routh-Hurwitz判据和Lyapunov函数证明FTSMESO与控制算法的稳定性和有限时间收敛性。仿真结果表明，对比传统控制方法，提出的控制算法跟踪各类指令精度更高，鲁棒性强；FTSMESO扰动估计的收敛时间更短，较线性扩张状态观测器缩短60%左右。该算法实现了良好的抗扰控制性能。

关键词: 电磁式微机电系统微镜, 扩张状态观测器, 有限时间收敛, 滑模控制, 抗扰控制

Abstract:

To enhance the disturbance rejection performance of electromagnetic micro-electro-mechanical system micromirrors in laser scanning and pointing tasks, an integral terminal sliding mode control method based on a fast terminal sliding mode extended state observer （FTSMESO） is proposed. Firstly, a FTSMESO is constructed to estimate and compensate for external disturbances and uncertainties, combined with integral terminal sliding mode control to achieve fast and stable tracking of control instructions. Then, through the Routh-Hurwitz criterion and the Lyapunov function, the stability and finite-time convergence of FTSMESO with the control algorithm are proved. The simulation results show that the proposed control algorithm achieves higher tracking accuracy and stronger robustness compared to conventional methods. The FTSMESO exhibits faster disturbance estimation convergence, reducing the convergence time by approximately 60% relative to the linear extended state observer. The algorithm delivers superior disturbance rejection performance.

Key words: electromagnetic micro-electro-mechanical system （MEMS） micromirrors, extended state observer （ESO）, finite-time convergence, sliding mode control, disturbance rejection control

中图分类号:

李伟鹏, 李先正, 张笑妍, 孙建锋, 朱玉凯. 基于快速终端滑模扩张状态观测器的电磁式MEMS微镜改进抗扰算法[J]. 系统工程与电子技术, 2026, 48(7): 2404-2414.

Weipeng LI, Xianzheng LI, Xiaoyan ZHANG, Jianfeng SUN, Yukai ZHU. Improved disturbance rejection algorithm based on fast terminal sliding mode extended state observer for electromagnetic MEMS micromirrors[J]. Systems Engineering and Electronics, 2026, 48(7): 2404-2414.

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控制器	参数
PID	K_p=49，K_i=549，K_d=0.01
ITSMC	k=506，c=0.0016b，p=21/19，η=0.68，λ=0.85，m=0.0053b，n=0.0016b

观测器	参数
LESO	ω_o=300
SMESO	ω_o=300，l₁=0.9，l₂=1.8，K₁=1.2，K₂=1.3
FTSMESO	ω_o=300，c₁=0.11，c₂=0.28，α=19/15，γ=35/33， μ₁=1.67，r₁=0.97，w=0.02

指令信号	PID	ITSMC	ITSMC+ LESO	ITSMC+ SMESO	ITSMC+ FTSMESO
阶跃信号	6.754×10⁻²	2.382×10⁻²	1.089×10⁻²	1.083×10⁻²	0.302×10⁻²
20 Hz正弦波	8.231×10⁻²	6.965×10⁻²	2.677×10⁻²	2.660×10⁻²	0.866×10⁻²
20 Hz三角波	7.772×10⁻²	5.655×10⁻²	2.346×10⁻²	2.327×10⁻²	0.872×10⁻²
90 Hz正弦波	8.601×10⁻²	8.959×10⁻²	5.309×10⁻²	5.197×10⁻²	2.783×10⁻²

扰动	性能指标	ITSM+LESO	ITSM+SMESO	ITSM+FTSMESO
d₁	RMS（e₃）/b	3.550	3.526	1.462
d₂	RMS（e₃）/b	12.655	12.619	3.510
d₃	RMS（e₃）/b	4.223	4.193	1.790
d₄	RMS（e₃）/b	1.055	1.048	0.570

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