基于快速终端滑模扩张状态观测器的电磁式MEMS微镜改进抗扰算法
李伟鹏, 李先正, 张笑妍, 孙建锋, 朱玉凯
Improved disturbance rejection algorithm based on fast terminal sliding mode extended state observer for electromagnetic MEMS micromirrors
Weipeng LI, Xianzheng LI, Xiaoyan ZHANG, Jianfeng SUN, Yukai ZHU
系统工程与电子技术
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2026, (7): 2404
-2414
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DOI: 10.12305/j.issn.1001-506X.2026.07.24
