基于快速终端滑模扩张状态观测器的电磁式MEMS微镜改进抗扰算法

doi:10.12305/j.issn.1001-506X.2026.07.24

Abstract

Abstract:

To enhance the disturbance rejection performance of electromagnetic micro-electro-mechanical system micromirrors in laser scanning and pointing tasks, an integral terminal sliding mode control method based on a fast terminal sliding mode extended state observer （FTSMESO） is proposed. Firstly, a FTSMESO is constructed to estimate and compensate for external disturbances and uncertainties, combined with integral terminal sliding mode control to achieve fast and stable tracking of control instructions. Then, through the Routh-Hurwitz criterion and the Lyapunov function, the stability and finite-time convergence of FTSMESO with the control algorithm are proved. The simulation results show that the proposed control algorithm achieves higher tracking accuracy and stronger robustness compared to conventional methods. The FTSMESO exhibits faster disturbance estimation convergence, reducing the convergence time by approximately 60% relative to the linear extended state observer. The algorithm delivers superior disturbance rejection performance.

Key words: electromagnetic micro-electro-mechanical system （MEMS） micromirrors, extended state observer （ESO）, finite-time convergence, sliding mode control, disturbance rejection control

CLC Number:

Weipeng LI, Xianzheng LI, Xiaoyan ZHANG, Jianfeng SUN, Yukai ZHU. Improved disturbance rejection algorithm based on fast terminal sliding mode extended state observer for electromagnetic MEMS micromirrors[J]. Systems Engineering and Electronics, 2026, 48(7): 2404-2414.

Figures/Tables 15

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控制器	参数
PID	K_p=49，K_i=549，K_d=0.01
ITSMC	k=506，c=0.0016b，p=21/19，η=0.68，λ=0.85，m=0.0053b，n=0.0016b

观测器	参数
LESO	ω_o=300
SMESO	ω_o=300，l₁=0.9，l₂=1.8，K₁=1.2，K₂=1.3
FTSMESO	ω_o=300，c₁=0.11，c₂=0.28，α=19/15，γ=35/33， μ₁=1.67，r₁=0.97，w=0.02

指令信号	PID	ITSMC	ITSMC+ LESO	ITSMC+ SMESO	ITSMC+ FTSMESO
阶跃信号	6.754×10⁻²	2.382×10⁻²	1.089×10⁻²	1.083×10⁻²	0.302×10⁻²
20 Hz正弦波	8.231×10⁻²	6.965×10⁻²	2.677×10⁻²	2.660×10⁻²	0.866×10⁻²
20 Hz三角波	7.772×10⁻²	5.655×10⁻²	2.346×10⁻²	2.327×10⁻²	0.872×10⁻²
90 Hz正弦波	8.601×10⁻²	8.959×10⁻²	5.309×10⁻²	5.197×10⁻²	2.783×10⁻²

扰动	性能指标	ITSM+LESO	ITSM+SMESO	ITSM+FTSMESO
d₁	RMS（e₃）/b	3.550	3.526	1.462
d₂	RMS（e₃）/b	12.655	12.619	3.510
d₃	RMS（e₃）/b	4.223	4.193	1.790
d₄	RMS（e₃）/b	1.055	1.048	0.570

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Improved disturbance rejection algorithm based on fast terminal sliding mode extended state observer for electromagnetic MEMS micromirrors

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