超精密轴向定位平台力特性分析及自抗扰控制
孟祥瑞, 王常虹, 马广程, 夏红伟, 钟佳朋, 崔总泽
Force characteristics analysis and active disturbance rejection control of ultra-precision axial positioning platform
Xiangrui MENG, Changhong WANG, Guangcheng MA, Hongwei XIA, Jiapeng ZHONG, Zongze CUI
系统工程与电子技术
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2026, (3): 1000
-1009
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DOI: 10.12305/j.issn.1001-506X.2026.03.24
