基于微形变分析的电容式MEMS加速度计温漂误差精密估计方法
齐兵, 程建华, 赵砚驰, 汪籽粒
Precise temperature drift error estimation method for capacitive MEMS accelerometers based on micro-deformation analysis
Bing QI, Jianhua CHENG, Yanchi ZHAO, Zili WANG
系统工程与电子技术
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2024, (7): 2437
-2445
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DOI: 10.12305/j.issn.1001-506X.2024.07.25
